Browse Prior Art Database

Pedestal Orienter

IP.com Disclosure Number: IPCOM000084828D
Original Publication Date: 1976-Jan-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 51K

Publishing Venue

IBM

Related People

Sacco, HN: AUTHOR [+2]

Abstract

Described is a rising pedestal/orienter, which is used in a wafer handling air track.

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Pedestal Orienter

Described is a rising pedestal/orienter, which is used in a wafer handling air track.

As shown in Fig. 1, the pedestal/orienter uses three directional air jets 4 in a pedestal 1 to hold the wafer 6 against a capstan 8 and a retractable rotating locator pin 10.

The first vacuum hold 12 releases and the wafer 6 floats to the second vacuum hold down 20, which activates the capstan 8 and locator pin 10 (Fig. 2). The second vacuum hold 20 releases, which turns on the air jets 14 causing the capstan 8 and locator pin 10 to rotate the wafer 6 towards the vacuum sensor 14 (Fig. 3). When the wafer notch locks into the locator pin 10 and over sensor 14, the capstan 8 stops rotating, the air jets 4 turn off, and the fingers 16 (Fig. 4) back up to move the wafer 6 away from the capstan 8. The wafer is now oriented.

A vacuum is aplied at port 21 and the locator pin 10 and two holding pins 16 retract below the bottom surface of the wafer 6 (Fig. 5). Also, the capstan 8, locator pin 10, and sensor 14 retract (Fig. 6). The wafer pedestal 1 rises a small distance which is sufficient to accommodate the gripper arms 12 of a transfer mechanism (Figs. 7 and 8).

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