Browse Prior Art Database

Making Josephson Junctions in one Vacuum Step

IP.com Disclosure Number: IPCOM000084888D
Original Publication Date: 1976-Jan-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 29K

Publishing Venue

IBM

Related People

Forster, T: AUTHOR [+2]

Abstract

To make a junction a window is opened in the Nb(2)O(5) isolation layer covering the Nb line which is to connect the junction. A photoresist layer is applied with a window somewhat larger than and in registration with the window in the Nb(2)O(5). The window in the photoresist should have a relatively large undercut.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 2

Making Josephson Junctions in one Vacuum Step

To make a junction a window is opened in the Nb(2)O(5) isolation layer covering the Nb line which is to connect the junction. A photoresist layer is applied with a window somewhat larger than and in registration with the window in the Nb(2)O(5). The window in the photoresist should have a relatively large undercut.

Through the window a first layer of InAuPb is deposited and covered by a tunnel oxide. A second layer of PbAuPb is then deposited thereupon in the same vacuum step. The second layer is deposited from a moving vapor source so as to assure good coverage of the junction edges. The photoresist is then stripped together with any metal deposited on top of it, and a connection line for the upper layer of the junction is applied in conventional ways.

1

Page 2 of 2

2

[This page contains 1 picture or other non-text object]