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Method for substrate noise reduction by using SoPI technology

IP.com Disclosure Number: IPCOM000084991D
Publication Date: 2005-Mar-02
Document File: 3 page(s) / 81K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for substrate noise reduction by using silicon on patterned insulator (SoPI) technology. Benefits include improved functionality and improved performance.

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Method for substrate noise reduction by using SoPI technology

Disclosed is a method for substrate noise reduction by using silicon on patterned insulator (SoPI) technology. Benefits include improved functionality and improved performance.

Background

      Substrate noise is a key challenge for on-chip mixed-signal designs and systems on a chip (SoCs). Many techniques have been developed to reduce the noise coupling from noisy digital components to noise-sensitive analog components on a silicon substrate. Guard rings (GRs) can reduce the substrate noise but consume too much silicon surface area and are not sufficiently effective. Noise wells (Nwells) prevent DC coupling but do not provide high frequency isolation due to the capacitive coupling itself. Radio frequency (RF) components function at very high frequencies, such as 2.4 GHz. No solution exists for high-frequency applications.

      Periodic structure has a frequency selective property. It provides forbidden bands and pass bands. These features have been widely used in antenna cover design for military applications. The RF analog integrated circuits have narrow bands around some discrete frequencies.

              Conventional solutions include the following:

•             Guard rings (see Figure 1)

•             Deep Nwells (see Figure 2)

•             Silicon on insulator (SOI) technology, which uses a uniform dielectric layer (see Figure 3)

•             Forbidden bands and pass bands

General description

              The disclosed method is substrate noise reduction in mixed-signal designs and SoCs by using trench and SOPI technology. It is a patterned SOI technology. The periodic pattern selectively stops wave propagation within some frequency bands, protecting analog circuits, especially RF circuits that have a discrete critical frequency. These forbidden bands can be easily controlled by the period an...