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Laminated NiFe Films for Bubble Domain Devices

IP.com Disclosure Number: IPCOM000085129D
Original Publication Date: 1976-Feb-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 22K

Publishing Venue

IBM

Related People

Ahn, KY: AUTHOR [+3]

Abstract

When metallization, such as NiFe films, is used to provide devices with amorphous magnetic bubble domain films, it is necessary to use a low-processing temperature to preserve the amorphous structure of the bubble domain film. Thus, the NiFe metallization is deposited at room temperature using lift-off techniques. However, the deposition of thick NiFe films (3,000 angstroms) at low temperatures produces films having high stress and low-magnetoresistive effect (0.5-1%).

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Laminated NiFe Films for Bubble Domain Devices

When metallization, such as NiFe films, is used to provide devices with amorphous magnetic bubble domain films, it is necessary to use a low- processing temperature to preserve the amorphous structure of the bubble domain film. Thus, the NiFe metallization is deposited at room temperature using lift-off techniques. However, the deposition of thick NiFe films (3,000 angstroms) at low temperatures produces films having high stress and low-magnetoresistive effect (0.5-1%).

To eliminate these problems, a laminate magnetic structure is used for the overlay. This structure is a laminate of NiFe-glass-NiFe, or multiples thereof. The laminate structure is chosen such that the product of stress and thickness (SxD) for the laminated structure is less than that for a single NiFe film. This product (SxD) is a measure of the elastic energy stored in the composite films. Use of such a lamination prevents peeling of the overlay films and provides a higher magnetoresistive effect.

A laminated structure comprising 1300 angstroms NiFe-300 angstroms glass-1300 angstroms NiFe has been deposited by electron-gun evaporation in the pressure range of 3-5 x 10/-6/ torr. This structure had the following magnetic properties: Magnetic thickness: 2600 angstroms total

Coercive force: 2.0 Oe.

Anisotropy field: 5.0 Oe.

Resistivity: 32 x 10/-6/ ohms

Magnetoresistance effect:l.5%.

In this example, Schott glass is compressive and reduces SxD. The effe...