Browse Prior Art Database

Random Access Air Track Sender and Receiver or Buffer

IP.com Disclosure Number: IPCOM000085178D
Original Publication Date: 1976-Mar-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 3 page(s) / 50K

Publishing Venue

IBM

Related People

Bertelsen, BI: AUTHOR [+2]

Abstract

In the use of an air cushion as a transport for semiconductor wafers or other workpieces and especially where environmental control is critical, especially as wafers become larger, a sender and receiver providing for random access or lot control and ambient quality surrounding the wafer is desirable. In the embodiment described, the clean air is brought directly to the wafer surfaces.

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Random Access Air Track Sender and Receiver or Buffer

In the use of an air cushion as a transport for semiconductor wafers or other workpieces and especially where environmental control is critical, especially as wafers become larger, a sender and receiver providing for random access or lot control and ambient quality surrounding the wafer is desirable. In the embodiment described, the clean air is brought directly to the wafer surfaces.

This is accomplished, as illustrated in the drawing, by providing an indexing table 1 with a series of horizontal shelves 3 for supporting workpieces 4. The table 1 is capable of vertical movement and is situated adjacent to an air track conveying means 2. The shelves 3 are so constructed as to have air or other gaseous medium emanating therefrom through the upper and bottom sides through jets 5.

The jets 5 on the upper side of the shelves 3 are constructed so as to direct an air vector in any desired direction, while the under side jets are such as to pour air upon the workpieces 4 which are retained by vacuum stops 6 as shown in Fig. 2. The result of this configuration allows the workpieces to be surrounded by a particular atmosphere at all times. The atmosphere may be that of an enclosed conveyor system or other desirable gases.

As shown in Fig. 2, the shelves 3 may be constructed so that the workpiece 4 has a slight overhang. The workpieces may be received onto the shelves 3 from an air track in a consecutive manner, or inserted from the opposite side 7 by use of a conventional compartment boat 8 or carrier, whereby a complete lot or a random group of wafers or workpieces 4 may be inserted or received from the arrangement. As is indicated in Fig. 1, modular additions 9 to the shelving stack make possible the storage of multiple carrier loads. This allows workpieces 4 to be handled in any manner desirable, including separation of lots and segregation into appropriate carriers in the receiver. The reliab...