Browse Prior Art Database

Plastic Ultrasonic Agitated Process

IP.com Disclosure Number: IPCOM000085228D
Original Publication Date: 1976-Mar-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 46K

Publishing Venue

IBM

Related People

Morreale, JA: AUTHOR

Abstract

As semiconductor manufacturing processes have developed, there has been an ever increasing need for an ultrasonic tank that can stand up to concentrated acids and other highly corrosive process chemicals.

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Plastic Ultrasonic Agitated Process

As semiconductor manufacturing processes have developed, there has been an ever increasing need for an ultrasonic tank that can stand up to concentrated acids and other highly corrosive process chemicals.

The tank illustrated uses the "double-boiler" approach. The inner tank 1, the material of which depends on the particular process chemical being used (e.g., TEFLON*, PVC, polypro, etc.) is separated from the outer tank 2, the material of which is stainless steel, by an area 3 which is filled with tap water mixed with a wetting agent. In this connection inlet 8 may be employed for filling the space 3 while outlet 9 may be used to drain the space 3.

This approach incorporates submersible transducers 4 which are bonded to the outer tank 2. The cavitation, or ultrasonic action, is transmitted from the outer tank 2 to the inner tank 1 with the aid of the water filled area 3. Since the transducers are not bonded to the inner tank 1, as in most ultrasonic tank-type apparatus, there is little chance of the inner tank incurring linear cracks.

The circulating coils 5 are used to either heat or cool the tank 1. If a particular process requires heated ultrasonic action, the circulating coils 5 may be hooked up to a circulating unit, not shown, which is thermostatically controlled (being sure, of course, that the inner tank material is capable of being heated to the operating temperature). The coils 5 may also be hooked up to a circulating...