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Proximity Latch and Unitary Wafer Holder and Transformer

IP.com Disclosure Number: IPCOM000085236D
Original Publication Date: 1976-Mar-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 46K

Publishing Venue

IBM

Related People

Emery, AH: AUTHOR [+2]

Abstract

Moving a semiconductor wafer from process station to process station or, for example, between process tanks such as etch, clean or rinse, etc. requires a fast and accurate movement, as well as a gentleness in handling to avoid breakage of the semiconductor wafer.

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Proximity Latch and Unitary Wafer Holder and Transformer

Moving a semiconductor wafer from process station to process station or, for example, between process tanks such as etch, clean or rinse, etc. requires a fast and accurate movement, as well as a gentleness in handling to avoid breakage of the semiconductor wafer.

Referring to the drawings, Fig. 1 illustrates a wafer holder or gripper 10 which has a plastic body A with spring wire inserts B and B', the wire B' being heavier and stiffer than wire B. The portions C of the wire which project from the body A are preferably coated with an inert material such as TEFLON* and include a lower TFE coated portion D with PFA molded fingers 11, which are spaced apart and serve to grip the peripheral edge of the wafer 12 without damage to the wafer.

The gripper 10 is normally closed and is actuated by equal forces applied at points F. The gripper assembly 10 is located relative to a reference, in the present instance a bifurcated nest gripper portion 13. A laterally extending bifurcated portion 14 includes an upper arm 15 spaced apart from a lower arm 16, the upper arm 15 including a pole plate 17 thereon.

As shown in Fig. 2, the beam 18 serves as a nest for retaining the lower bifurcation 13 about its reference point E. When it is desired to move the gripper 10 from one location to another, a transport arm 22 which is movable in the axial direction along the arrows 19--19, and pivotable about its pivot point 20 is moved ...