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Scanning Electron Microscopy Sample Holders for Round and Square Transmission Electron Microscopy Samples

IP.com Disclosure Number: IPCOM000085244D
Original Publication Date: 1976-Mar-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 54K

Publishing Venue

IBM

Related People

Dessauer, RG: AUTHOR

Abstract

Samples to be examined by transmission electron microscopy (TEM) must routinely be thinned by etching to approximately 0.1 micron in the areas to be examined. Samples to be examined by scanning electron microscopy (SEM) must routinely be attached to sample holders by conductive, adhesive paint. The paint must be completely dry before the sample can be placed in the microscope chamber.

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Scanning Electron Microscopy Sample Holders for Round and Square Transmission Electron Microscopy Samples

Samples to be examined by transmission electron microscopy (TEM) must routinely be thinned by etching to approximately 0.1 micron in the areas to be examined. Samples to be examined by scanning electron microscopy (SEM) must routinely be attached to sample holders by conductive, adhesive paint. The paint must be completely dry before the sample can be placed in the microscope chamber.

The SEM sample holder design prevents destruction of thinned sample areas by the conductive paint, thus enabling the examination of samples by TEM and SEM consecutively and alternately. The design prevents the paint from reaching the thin central area while wetting only the thick perimeter of the sample, by which it is then attached to the holder.

TEM samples must routinely be cut to shapes and sizes to fit the TEM sample holder. Samples may be either square cut, which is a slower method but used when sample material is scarce, or round (e.g., 3mm in dia).

The sample holder shown in Fig. 1A and the square sample holder of Fig. 2A, enable the sample to be aligned accurately so that its thinned central area coincides with a hole at the bottom of the support groove. The hole assures the absence of adhesive below the thinned area of the sample.

Surface tension in the liquid adhesive around the edge of the hole will tend to draw any excess liquid into the hole, preventing the wetting...