Browse Prior Art Database

Electrical Probe

IP.com Disclosure Number: IPCOM000085334D
Original Publication Date: 1976-Mar-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 47K

Publishing Venue

IBM

Related People

Chase, BD: AUTHOR [+2]

Abstract

This probe provides electrical contact to a number of selected points on a chip or wafer and is designed for use in a scanning electron microscope.

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Electrical Probe

This probe provides electrical contact to a number of selected points on a chip or wafer and is designed for use in a scanning electron microscope.

As shown in the figure a lower plate carries a fixing screw for mounting in the electron microscope. The lower plate has two small holes in which the points of two pointed screws extending through an upper plate are located to provide a play-free hinge. The pointed screws are adjusted to provide a desired height of the upper plate and then cemented in position. The plates can be opened and closed by a jacking screw and two adjustable springs urge the plates together.

The end of the upper plate remote from the hinge is apertured to allow an electron beam to strike a wafer on a mount located between the two plates. A tubular rubber cushion is threaded through holes in the upper plate to provide a clamp for the wafer.

Mounted on the upper plate are up to six probe assemblies as described on page 4069 of the IBM Technical Disclosure Bulletin, May 1974, Vol. 16, No. 12. Electrical contacts to the wafer are made by tipped tungsten wires carried in hypodermic tubes within the probe assemblies. The probe assemblies are adjusted to select points before the probe is placed in the electron microscope.

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