Browse Prior Art Database

Continuous Wave Laser Array

IP.com Disclosure Number: IPCOM000085370D
Original Publication Date: 1976-Mar-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 44K

Publishing Venue

IBM

Related People

Zory, PS: AUTHOR

Abstract

A room temperature continuous wave (CW) laser array is provided which is able to maintain good heat sinking, as well as electrical isolation between the individual laser elements in the array.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 78% of the total text.

Page 1 of 2

Continuous Wave Laser Array

A room temperature continuous wave (CW) laser array is provided which is able to maintain good heat sinking, as well as electrical isolation between the individual laser elements in the array.

The figure is a schematic showing of an array of individual injection lasers 2 built up on a unit that provides good heat conduction away from the lasers, as well as electrical isolation between them. A P-type silicon block 4 is supported on a copper block 6. In order to make a top layer of the P-type silicon insulating, a diffusion of N-type ions is made to a level shown by the dotted line 8.

By the use of conventional photolithographic and electroplating techniques, copper stripes 10 are formed on the diffused layer 8 of P-type silicon 4. Conventional etching solutions of KOH are employed, through masks, to etch vertical walled grooves into the silicon and copper. In order to achieve vertically etched walls, the etching must take place along a direction that is perpendicular to the (111) plane of the silicon 4. The grooves 12 produced by the etching are filled with a fluid or liquid that is a good thermal conductor, but a poor electrical conductor.

Atop each stripe of copper 10 is constructed an injection laser 2, each of which has a PN junction which is the active region producing light when current is sent in a direction through the laser 2 that is perpendicular to the plane of the PN junction. A common electrode 14 connects all the lasers 2...