Browse Prior Art Database

Positioning an Article Supported by a Positive Air Flow

IP.com Disclosure Number: IPCOM000085448D
Original Publication Date: 1976-Apr-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 33K

Publishing Venue

IBM

Related People

Gardiner, GG: AUTHOR [+3]

Abstract

U. S. Patent 3,523,706 discloses apparatus for supporting an article such as a wafer in a positive or Bernoulli air flow, and for positioning the wafer by rotating it through the positive air flow against a fixed orienting stud which engages a peripheral notch on the wafer.

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Positioning an Article Supported by a Positive Air Flow

U. S. Patent 3,523,706 discloses apparatus for supporting an article such as a wafer in a positive or Bernoulli air flow, and for positioning the wafer by rotating it through the positive air flow against a fixed orienting stud which engages a peripheral notch on the wafer.

The present structure relates to an improvement in the orienting mechanism. With reference to the drawing, a semiconductor wafer 10 is supported by a Bernoulli or positive air flow moving in the direction shown by arrows 11. The air flow is such that it is slightly unbalanced with respect to the center of gravity 12 of the wafer 10, when the wafer is moved into tangential contact with orienting members 13 and 14 by the air flow 11.

This unbalanced air flow 11 rotates the wafer 10 in the counterclockwise direction shown until the notch 15 in the wafer engages and becomes locked into orienting member 13 which has a slightly smaller diameter than the notch 15 in the wafer 10.

Except for the difference in diameter, orienting members 13 and 14 have a similar construction which will be described with respect to member 14. It comprises a thin plastic sleeve 16 surrounding and spaced from a fixed pin 17 which is hollow and serves as a conduit for an air jet passing through the pin and through openings positioned along the inner surface of the pin against the inner walls of sleeve 16, so that each orienting member acts as a frictionless air- beari...