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Ion Source Utilizing Electron Cyclotron Resonant Discharge for Ion Implantation

IP.com Disclosure Number: IPCOM000085466D
Original Publication Date: 1976-Apr-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 36K

Publishing Venue

IBM

Related People

Ko, WC: AUTHOR [+2]

Abstract

The ion source described (hereafter referred to as the ECR source) consists of a hollow metallic cavity and a DC magnetic field. An electromagnetic field is impressed upon the cavity at a frequency at or near the electron cyclotron frequency in the DC magnetic field, causing an electrodeless discharge to occur. An ion beam may then be extracted from the discharge by any of the conventional methods. The drawing illustrates one possible configuration of the source.

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Ion Source Utilizing Electron Cyclotron Resonant Discharge for Ion Implantation

The ion source described (hereafter referred to as the ECR source) consists of a hollow metallic cavity and a DC magnetic field.

An electromagnetic field is impressed upon the cavity at a frequency at or near the electron cyclotron frequency in the DC magnetic field, causing an electrodeless discharge to occur. An ion beam may then be extracted from the discharge by any of the conventional methods. The drawing illustrates one possible configuration of the source.

The DC magnetic field required is determined by the electron cyclotron frequency Wc ( = eB/m ), where B is the magnetic field, and e and m are the electronic charge and mass, respectively. For the generation of multiple-charged ions, it is desirable that the magnetic field have two local maxima inside the discharge volume. The high-frequency electromagnetic energy is introduced into the cavity either by a magnetic loop or an electric coupling antenna.

Depending upon operating conditions after the discharge, the resonant characteristics of the cavity may change due to the presence of the discharge. Therefore, provision should be made for dynamic tuning of the cavity to maximize the coupling of the electromagnetic energy to the discharge. The extraction electrodes shown is operated in the acceleration-deceleration configuration.

The ECR source has the following advantages: its lifetime is much longer, limited by the lifetime of...