Browse Prior Art Database

Wafer Entry System

IP.com Disclosure Number: IPCOM000085469D
Original Publication Date: 1976-Apr-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 60K

Publishing Venue

IBM

Related People

Kostenko, A: AUTHOR

Abstract

Fig. 1 shows a wafer entry system 2 that enters wafers into the manufacturing line and identifies the wafers using a wafer serial number (WSN) reader 16. Also shown is a central wafer handler 4 reversibly movable on a carriage of an overhead track, not shown. The wafer entry system 2 consists of:.

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Wafer Entry System

Fig. 1 shows a wafer entry system 2 that enters wafers into the manufacturing line and identifies the wafers using a wafer serial number (WSN) reader 16. Also shown is a central wafer handler 4 reversibly movable on a carriage of an overhead track, not shown. The wafer entry system 2 consists of:.

Dual-wafer cartridge assemblies or buffers 7 and 8 which are closed wafer carriers. Each cartridge is loaded off-line with 50 wafers (maximum) at a 0.250 inch pitch. The wafers are individually retained in their own nest, at a predetermined force, without damaging the wafers. The two cartridge assemblies 7 and 8 each have a 100 wafer capacity.

Cartridge indexing mechanism (CIM) 9 consists of a housing that contains a mechanical elevator mechanism. The elevator mechanism is controlled by a closed-loop stepping motor. The buffer has two CIMs 9.

Cross motion pedestal (CMP) 10, 11 (Fig. 1) is a transfer mechanism between the loader and air track 12. It is an electromechanical device that consists of a movable vacuum chuck. The CMP enters the cartridge and the vacuum chuck picks up a wafer when the CIM 9 moves one pitch. CMP 10, 11 then moves the wafer onto the air track 12 and releases it.

Wafer orienter/reader 16 positions the wafers and reads the theta modulated wafer identification number. Air track 18 transports wafers from the wafer orienter/reader 16 to the taxi interface unit 15. The taxi interface unit 15 has a rising pedestal mechanism 17 that de...