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Browse Prior Art Database

Output Buffer System

IP.com Disclosure Number: IPCOM000085470D
Original Publication Date: 1976-Apr-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 71K

Publishing Venue

IBM

Related People

Kostenko, A: AUTHOR

Abstract

Fig. 1 shows a work station output buffer system 2 that stores the wafer output of a preceding station 4. The buffer is installed at the end of the station opposite the interface with the wafer conveyor. The buffer 2 consists of:.

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Output Buffer System

Fig. 1 shows a work station output buffer system 2 that stores the wafer output of a preceding station 4. The buffer is installed at the end of the station opposite the interface with the wafer conveyor. The buffer 2 consists of:.

A dual-wafer cartridge assembly 8 (Figs. 1 and 2) which is a closed wafer carrier. Each cartridge 6 can hold up to 50 wafers at a 0.250 inch pitch. Wafers are individually retained in their own nest, at a predetermined force, without damaging the wafers. The buffer has two pairs of cartridges 6 and 10 (100 wafer capacity).

Cartridge indexing mechanism (CIM) 10 consists of a housing that contains a mechanical elevator mechanism. The elevator mechanism is controlled by a closed-loop stepping motor.

There are two cross motion pedestals (CMP's) 14 and 16 (Fig. 1). They are used as transfer mechanisms between the loader and the air track 15. The CMP is an electromechanical device that consists of a movable vacuum chuck. The CMP enters the cartridge 6 and the vacuum chuck picks up a wafer when the CIM 10 moves one pitch. The CMP then moves the wafer onto the air track 15 and releases it.

When a wafer is moved off-line, the movable vacuum chuck picks up a wafer from the air track 15 and brings it into the loader, where upon the movement of one pitch up of the cartridge 6, the wafer lifts off the vacuum chuck and the CMP returns it to its home position.

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