Browse Prior Art Database

Interstation Buffer

IP.com Disclosure Number: IPCOM000085471D
Original Publication Date: 1976-Apr-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 67K

Publishing Venue

IBM

Related People

Kostenko, A: AUTHOR

Abstract

Figs. 1 and 2 show an interstation buffer 2 that holds a preceding station's 4 work in process. It is only used if a following station 6 is unable to accept wafers and the preceding substation cannot safely contain the wafers. The buffer 2 is capable of random access or first-in, first-out (FIFO) storage of 50 wafers. The buffer consists of:

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Interstation Buffer

Figs. 1 and 2 show an interstation buffer 2 that holds a preceding station's 4 work in process. It is only used if a following station 6 is unable to accept wafers and the preceding substation cannot safely contain the wafers. The buffer 2 is capable of random access or first-in, first-out (FIFO) storage of 50 wafers. The buffer consists of:

Single wafer cartridge assembly 9 (Fig. 2) that is a closed wafer carrier which can hold up to 50 wafers at a 0.250 inch pitch. Wafers are individually retained in their own nest, at a predetermined force, without damaging the wafers. The buffer 2 has one cartridge 8 (50 wafer capacity).

Cartridge indexing mechanism (CIM) 12 consists of a housing that contains a mechanical elevator mechanism. The elevator mechanism is controlled by a closed-loop stepping motor.

Cross motion pedestal (CMP) 14 (Figs. 1 and 2) is a transfer mechanism between the loader and the air track 16. It is an electromechanical device that consists of a movable vacuum chuck. The CMP 14 enters the cartridge 8 and the vacuum chuck picks up a wafer when the CIM 12 moves one pitch. The CMP 14 then moves the wafer onto the air track 16 and releases it.

When a wafer is moved off-line, the movable vacuum chuck picks up a wafer from the air track 16 and brings it into the loader, where upon the movement of one pitch up of the cartridge 8, the wafer lifts off the vacuum chuck and the CMP 14 returns it to its home position.

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