Browse Prior Art Database

Linear Wafer Control

IP.com Disclosure Number: IPCOM000085478D
Original Publication Date: 1976-Apr-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 39K

Publishing Venue

IBM

Related People

Gardiner, GG: AUTHOR [+3]

Abstract

Shown are two air bearing sleeve/pin combinations 2 that are set on each side of an air track. Cross-drilled air jets 4 with their constant air flows are aimed so that the air bearing sleeve 2 is projected angularly towards the center of track 6, with excess air restrictively bled through vent 20.

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Linear Wafer Control

Shown are two air bearing sleeve/pin combinations 2 that are set on each side of an air track. Cross-drilled air jets 4 with their constant air flows are aimed so that the air bearing sleeve 2 is projected angularly towards the center of track 6, with excess air restrictively bled through vent 20.

The travelling wafer 8 has its front lead portion covering control port 12 as the wafer enters between air bearing sleeves 2. The wafer 8 is retained at the station until upstream control indicates an open track for wafer travel.

On a send signal, control vent 21 is opened, dumping air from within sleeves 2, permitting them to open and release the wafer 8. It is to be understood that a plurality of these brake units 2 can be employed, with open wafer receiving positions signalling release of wafers 8 at upstream brake stations.

The air bearing sleeves 2 consist of thin-walled plastic cylinders that slip over small diameter pins. The pins are cross-drilled so that ported air can be directed against the inside of the sleeves in a desired direction, creating a gate.

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