Browse Prior Art Database

Wafer Transfer Systems

IP.com Disclosure Number: IPCOM000085484D
Original Publication Date: 1976-Apr-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 3 page(s) / 65K

Publishing Venue

IBM

Related People

Kehagiouglou, T: AUTHOR

Abstract

Shown are two systems for transferring semiconductor wafers, and similar articles, between and/or for transport to processing stations during device fabrication.

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Wafer Transfer Systems

Shown are two systems for transferring semiconductor wafers, and similar articles, between and/or for transport to processing stations during device fabrication.

The processing stations are generally indicated by the numerals 1 and 2 characterized with load/unload sectors 3 and 4, respectively.

Each such sector has a vertically reciprocal pedestal 5 adapted, by a screw driven elevator mechanism, to position the end portion of the pedestal 5 in alignment with a conveyor 6, such as an air track, and with a bifurcated vacuum chuck 7 carried by carriage 8 adapted for travel on an overhead rail 9. Each of the reciprocable pedestals 5 are enclosed by a transparent tower 10, provided at its upper portion with a peripheral slot 11 to accommodate access by chuck 7.

With pedestals 5 in the lowered position, wafers 12 can be either removed from, onto conveyor 6, or positioned on the top surface of the pedestal 5 where they are retained by a vacuum port, not shown. In the upwardly extended position, pedestals 5 aligns wafer 12 with vacuum chuck 7 of carrier 8.

Vacuum chuck 7 is horizontally reciprocal by a rack and pinion assembly 15, from a retracted position, within carriage 8, to an extended position, through slot 18 of carriage housing 16 and slot 11 of tower 10, where the bifurcated tines mate about pedestal 5, below wafer 12. On retraction of pedestal 5, wafer 12 is deposited on top of chuck 7 where it is retained by vacuum ports distributed along the bifurcated tines. After positioning of the wafer 12, chuck 7 is retracted, and carriage 8 is actuated to move to the next station. For inputting of wafers 12 to a like station, the sequence of operations is reversed.

Fig. 2 shows a modification where wafers 12 are entered into and remo...