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Increasing Sorption Pumps Capabilities

IP.com Disclosure Number: IPCOM000085499D
Original Publication Date: 1976-Apr-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 39K

Publishing Venue

IBM

Related People

Oldakowski, CC: AUTHOR [+2]

Abstract

A load/unload (L/UL) chamber uses sorption pumps to produce a rough vacuum. The sorption pumps are rated at pressure

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Increasing Sorption Pumps Capabilities

A load/unload (L/UL) chamber uses sorption pumps to produce a rough vacuum. The sorption pumps are rated at pressure </= 50 Mu with time </= 4 seconds for 400 L/UL cycles.

However, noble gas accumulates in the sorption pumps limiting the pump- down time. A valve open overlap is used between the roughing valve and the L/UL chamber's elevator high-vacuum valve, which reduces the background noble gases in the sorption pumps and increases the sorption pump's rating to 800 L/UL cycles (Fig. 1). The noble gases are now pumped by the main chamber's ion pump.

Fig. 2 is a plot of pump-down time (in seconds) to reach 50 Mu versus the L/UL cycle count, with and without a valve overlap.

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