Dismiss
InnovationQ will be updated on Sunday, Oct. 22, from 10am ET - noon. You may experience brief service interruptions during that time.
Browse Prior Art Database

Multiuse Solvent Station

IP.com Disclosure Number: IPCOM000085503D
Original Publication Date: 1976-Apr-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 44K

Publishing Venue

IBM

Related People

Palagonia, AM: AUTHOR [+2]

Abstract

This is a solvent station in semiconductor wafer processing which is not made obsolete when a change is made in the process, and which requires the use of different chemicals. The station satisfies the standards of the Occupational Safety and Health Act for storage of flammable and the nonflammable solvents.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 2

Multiuse Solvent Station

This is a solvent station in semiconductor wafer processing which is not made obsolete when a change is made in the process, and which requires the use of different chemicals. The station satisfies the standards of the Occupational Safety and Health Act for storage of flammable and the nonflammable solvents.

As shown in the figure, each tank is connected to an individual line for entry of the solvent and connected to the same drain and venting system. Each tank may be drained to the building drain system or to a collection can.

The system may also be adopted with the fail-safe system described in the publication entitled "Monitor Circuit for Solvent Stations," by Palagonia et al in the IBM Technical Disclosure Bulletin, Vol. 18, No. 7, December 1975, pages 2174 and 2175.

1

Page 2 of 2

2

[This page contains 3 pictures or other non-text objects]