Browse Prior Art Database

Integrated Circuit Diagnostic and Characteristic System

IP.com Disclosure Number: IPCOM000085508D
Original Publication Date: 1976-Apr-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 43K

Publishing Venue

IBM

Related People

Morrissey, JM: AUTHOR

Abstract

A laser cutting system and a chip electrical probe system is combined into a single unit, to perform failure analysis and characterization of integrated circuit chips. Electrical probing, the opening of metal lines, and the introduction of set conditions in the chip may be done in situ.

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Integrated Circuit Diagnostic and Characteristic System

A laser cutting system and a chip electrical probe system is combined into a single unit, to perform failure analysis and characterization of integrated circuit chips. Electrical probing, the opening of metal lines, and the introduction of set conditions in the chip may be done in situ.

As shown in the figure, the system comprises a microscope with a sufficient working distance to permit the probes to contact the chip's surface, while the chip is being viewed and while using the laser. The beam of the laser is aligned with the optical axis of the microscope and is fired only when a conductive land is to be opened, or a set condition introduced into a circuit under test. The attenuator allows the energy infringing on the integrated circuit to be controlled. The vidicon allows observation and recording of the operation.

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