Browse Prior Art Database

Stylus Suspension for Surface Analyzer

IP.com Disclosure Number: IPCOM000085534D
Original Publication Date: 1976-Apr-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 41K

Publishing Venue

IBM

Related People

Berger, LL: AUTHOR [+2]

Abstract

As shown in the figure, a V-shaped arm 2 for the stylus 1 is resiliently suspended by a leaf spring 3. The stylus 1 comprises ultrafine facets to precisely sense a small hillock or valley in a surface. A counterweight 4 rough balances the arm 2. A fine resilient helical spring 5 counterbalances the counterweight 4 to a very narrow range.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 2

Stylus Suspension for Surface Analyzer

As shown in the figure, a V-shaped arm 2 for the stylus 1 is resiliently suspended by a leaf spring 3. The stylus 1 comprises ultrafine facets to precisely sense a small hillock or valley in a surface. A counterweight 4 rough balances the arm 2. A fine resilient helical spring 5 counterbalances the counterweight 4 to a very narrow range.

A damping means such as a hydraulic cylinder 6 and connecting rod 7 serves to counterbalance the arm 2, and thus affect the stylus load within the ultrafine balance range. Further, the damper cylinder 6 dampens the bouncing effect potentially resulting from any sudden movement of the arm 2. A sensing means such as a mirror 8 is mounted to the arm 2 to sense any vertical motion, such as by reflecting a light beam. The sensing mirror 8 preferably does not affect the arm balancing or movement.

In operation, relative motion is provided between the surface to be tested and the stylus 1. The precision balancing and the fine tipped stylus 1 permits the arm 2 to react to any change in vertical height between any two points, and thus the surface height can be precisely analyzed by appropriately sensing the sensing means such as a light beam reflected from mirror 8.

1

Page 2 of 2

2

[This page contains 2 pictures or other non-text objects]