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Repeatedly Oriented Universal Wafer Check

IP.com Disclosure Number: IPCOM000085685D
Original Publication Date: 1976-May-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 46K

Publishing Venue

IBM

Related People

Ringel, GW: AUTHOR

Abstract

Any wafer with a flat along an edge thereof can be repeatedly rechecked on the chuck with the same orientation. The manually operated wafer chuck is capable of accommodating silicon wafers from one-inch diameter to four-inch diameter. The chuck assures exact and repeatable positioning of any size wafer for checking or rechecking.

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Repeatedly Oriented Universal Wafer Check

Any wafer with a flat along an edge thereof can be repeatedly rechecked on the chuck with the same orientation. The manually operated wafer chuck is capable of accommodating silicon wafers from one-inch diameter to four-inch diameter. The chuck assures exact and repeatable positioning of any size wafer for checking or rechecking.

The unit consists of a base plate 10 in the center of which is located a vacuum chamber 12. The outer surface of the vacuum chamber serves as the shaft 13 on which the drive cam 14 rotates. The drive cam 14 has three cam contour slots 16 designed such that uniform pressure feel is communicated to the operator, regardless of wafer size. The cam 14 is designed to have a 23 degree angle throughout the cam contour. This assures equal pressure for ramping on any segment of the cam face.

The top plate 18 has vacuum ports 20 located therein and has three straight slots 22 located 120 degree apart, extending from the center to the periphery on the top plate. Three pin shafts 24 are utilized to create the interaction between the cam 14 and the top plate 18.

As the cam 14 rotates the radial motion imparted to the pins 24 by the cam slots 16 is converted to straight motion in the top plate slots 22. The cam rotation is accomplished by virtue of a knurled outer ring 26 to which the cam 14 is attached. Slider disks 28 lock the pin shafts 24 to the cam 14 with a roller bearing running in the cam contour.

The p...