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Improving the Surface Cleanliness and Stability of Metallic Films Subsequently Subjected to a Glass Flow Out Cycle

IP.com Disclosure Number: IPCOM000085958D
Original Publication Date: 1976-Jun-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Anschel, M: AUTHOR [+3]

Abstract

A method is provided for cleaning Cr-Cu-Cr lines, prior to dielectric spray and reflow, to yield < 1 ppb of low-molecular weight (50-150) organic residues as indicated by plasma chromatography. The cleaning procedure also provides Cr-Cu-Cr line protection (in a gas panel display application) from susceptibility to glass attack and line geometry change, during the lead-borosilicate dielectric glass flowout process.

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Improving the Surface Cleanliness and Stability of Metallic Films Subsequently Subjected to a Glass Flow Out Cycle

A method is provided for cleaning Cr-Cu-Cr lines, prior to dielectric spray and reflow, to yield < 1 ppb of low-molecular weight (50-150) organic residues as indicated by plasma chromatography. The cleaning procedure also provides Cr- Cu-Cr line protection (in a gas panel display application) from susceptibility to glass attack and line geometry change, during the lead-borosilicate dielectric glass flowout process.

The above is accomplished by cleaning the Cr-Cu-Cr films with a CrO(3)/H(2)O and DMF solutions so that, in addition to obtaining a contaminant free surface, a uniform but thin carbon free Cr-oxide film (7-14 A thick) is formed. Such cleaned and oxidized samples, when exposed to the usual dielectric glass- flowout process, exhibit improved wetting by the dielectric glass, less susceptibility to glass attack, and better preservation of the line geometry.

Samples of evaporated Cr-Cu-Cr lines on soda lime plate glass were cleaned as follows: (1) Ultrasonically excite a mixture of a hot (160 degree F) LIQUINOX* detergent (1 oz./gal.) in H(2)O for 15 minutes. (2) Deionized water rinse for 15 minutes under ambient conditions (RT). (3) Ultrasonically excite a mixture of hot (160 degrees F) 33% CrO(3) H(2)O for 15 minutes. (4) Deionized water rinse for 15 minutes (RT). (5) Isopropyl alcohol rinse for 5 minutes (RT). (6) Dimethylformamide rinse for...