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Browse Prior Art Database

Contactless Electric Testing of Conductors

IP.com Disclosure Number: IPCOM000086070D
Original Publication Date: 1976-Jul-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 2 page(s) / 36K

Publishing Venue

IBM

Related People

Bohlen, H: AUTHOR [+2]

Abstract

This method serves to test electrical interconnections of miniaturized circuits for continuity and interruption by molecule, atom or ion beams with a discrimination threshold in the region of 40 k omega.

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Contactless Electric Testing of Conductors

This method serves to test electrical interconnections of miniaturized circuits for continuity and interruption by molecule, atom or ion beams with a discrimination threshold in the region of 40 k omega.

Conductor end areas on a substrate surface are used as targets 1, 2, conductor 3 being a metallic or highly doped layer deposited on substrate 4. Beams 5, 6, which may consist of molecules or atoms as well as of positive and/or negative ions, are directed onto targets 1, 2 through openings 7, 8 of mask 9 arranged at a distance above the surface of substrate 4. Mask 9 carries on its lower surface metallic collectors 10, 11 surrounding openings 7, 8. DC voltages VC1, VC2 are applied to collectors 10, 11.

Primary beams 5, 6 impinging on targets 1, 2 cause a secondary emission of charged particles resulting in currents flowing between target and collector.

For example, partial currents of positive ions (Ipi), negative ions (Ini), electrons (Ieo), and emitted electrons (Iei) returning to the target cause a target to assume a positive potential VT if Ie > Ii, with Ie = (Ieo - Iel) and Ii = (Ipi - Ini).

When targets 1, 2 are connected by conductor 3 having a resistance R, different target potentials VT1, VT2 are established and additional currents, including a current I, flow through conductor 3, according to: Iin + Ien + In = 0 (n = 1,2) I1 #= -I2 = I VT2 - VT1 = R.I.

The current changes in the collector supply lines thus crea...