Browse Prior Art Database

Sliding Boat to Improve the Quality of Liquid Phase Epitaxial Layers

IP.com Disclosure Number: IPCOM000086157D
Original Publication Date: 1976-Jul-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 2 page(s) / 31K

Publishing Venue

IBM

Related People

Potemski, RM: AUTHOR [+2]

Abstract

In the liquid phase epitaxial growth of gallium arsenide compounds, the normal well in which the molten solution is held for growth onto a substrate has square corners and no pressure is applied to the solution. As a result, the solutions do not necessarily fill the wells, especially the corners where the radius of curvature is very small and surface tension is an inhibiting factor.

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Sliding Boat to Improve the Quality of Liquid Phase Epitaxial Layers

In the liquid phase epitaxial growth of gallium arsenide compounds, the normal well in which the molten solution is held for growth onto a substrate has square corners and no pressure is applied to the solution. As a result, the solutions do not necessarily fill the wells, especially the corners where the radius of curvature is very small and surface tension is an inhibiting factor.

In the design, shown in plan and side views in the figures, there are circular columns 1 disposed at the four corners of each well 2, providing a larger radius of curvature. Columns 1 also provide for an expansion space for the solution so that pressure may be applied to the solutions, and interchange of solution takes place between columns 1 and the main well 2 as the solution moves over an uneven surface. (The substrate 3 on which growth takes place is recessed in the substrate section 4 of boat 5.)

In addition, columns 1 provide a route for gas interchange with the environment of the growth tube and this is facilitated by surface channels 6, cut in the well block section 7 of boat 5. A substrate 8 is positioned atop the solution disposed in well 2.

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