Browse Prior Art Database

Four Position Wafer Carrier

IP.com Disclosure Number: IPCOM000086210D
Original Publication Date: 1976-Aug-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 2 page(s) / 37K

Publishing Venue

IBM

Related People

Boudah, RF: AUTHOR [+3]

Abstract

Described is a simple mechanical drive and method of positioning a wafer holder on the horizontal for loading purposes, and in a nonhorizontal position when rotated from its upward loading position to a working position.

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Four Position Wafer Carrier

Described is a simple mechanical drive and method of positioning a wafer holder on the horizontal for loading purposes, and in a nonhorizontal position when rotated from its upward loading position to a working position.

The assembly 10 comprises a wafer gripper mechanism 11, adapted to hold and position a wafer 12 supported on a spindle 13. One end of the spindle 13 is provided with a passageway 14 and a flat 15, traverse to the passageway 14. The flat 15 is at an angle to the center line 16 of the spindle 13, that is; this flat is not parallel to the center line 16.

Affixed in the passageway 14, on the center line 16, by a pivot pin 17, is one end 18a of a rotatable shaft 18 which passes through a shaft holder 19. The other end 18b of the shaft 18 is coupled to a gear 20 which rotates the shaft 18 about its center line 21. The shaft 18 holds the flat 15 on the spindle and can be spring loaded against the end 19a of shaft holder 19.

The end 19a of the shaft holder 19 is provided with a fixed angle which is complementary to the angle of the flat 15 such that when the shaft 18 is rotated 180 degrees from the position shown in the figure, the angles cause the wafer gripper 11 and thus the wafer 12 to be perfectly horizontal. A detent to insure accurate registration in each of the two extreme positions is desirable.

When in the downward position, as shown in the figure, the angles add together to cause the wafer gripper and the wafer to b...