Browse Prior Art Database

Wafer Removal Tool

IP.com Disclosure Number: IPCOM000086281D
Original Publication Date: 1976-Aug-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 2 page(s) / 28K

Publishing Venue

IBM

Related People

Hoeg, AJ: AUTHOR [+2]

Abstract

Shown is a tool for removing wafers from single wafer processing tanks.

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Wafer Removal Tool

Shown is a tool for removing wafers from single wafer processing tanks.

The system comprises a TEFLON* cup 10 attached to a TEFLON tube 11 which is connected to a pressure vacuum switch 12. The tool may be inserted into any process tank with a slight pressure on the cup 10 which will prevent any chemical from entering into the tool. When the cup 10 of this device is in close proximity to the wafer, the pressure is switched off and the vacuum comes on attracting the wafer to the cup 10.

This tool minimizes the sucking up of chemicals into the tool and allows a wafer to be removed from a single wafer process tank. * Trademark of E. I. du Pont de Nemours & Co.

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