Browse Prior Art Database

Scanning Electron Microscope System for Testing Circuit Devices

IP.com Disclosure Number: IPCOM000086316D
Original Publication Date: 1976-Aug-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 3 page(s) / 56K

Publishing Venue

IBM

Related People

DeStafeno, JJ: AUTHOR [+5]

Abstract

A scanning electron microscope 2 and associated components produce the image of a semiconductor device or other specimen on a TV monitor 3. Secondary electrons that are produced by a specimen in the scanning electron microscope are amplified by a photomultiplier 4. The output of the photomultiplier is an electrical signal that is amplified by video amplifier 5. A scan converter 6 converts the video signal to a composite video and sync signal that is suitable for TV monitor 3. A video mixer 7 combines the output of scan converter 6 with a cursor signal on a line 8 and supplies a signal to the TV monitor 3.

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Scanning Electron Microscope System for Testing Circuit Devices

A scanning electron microscope 2 and associated components produce the image of a semiconductor device or other specimen on a TV monitor 3. Secondary electrons that are produced by a specimen in the scanning electron microscope are amplified by a photomultiplier 4. The output of the photomultiplier is an electrical signal that is amplified by video amplifier 5. A scan converter 6 converts the video signal to a composite video and sync signal that is suitable for TV monitor 3. A video mixer 7 combines the output of scan converter 6 with a cursor signal on a line 8 and supplies a signal to the TV monitor 3.

The cursor signal on line 8 is generated by a cursor generator 9 that responds to a cursor control 11 that is selectively operated by personnel using the system.

A digital scan generator 12 produces a signal to control the sweep of the electron beam in the scanning electron microscope. The digital scan generator 12 is controlled by a beam position control 14. One of the inputs to the beam position control is provided by cursor control 11, for selectively controlling the scan in the area selected by the cursor. An output from beam position control 14 is applied to a discriminator bias control 16 for adjusting the bias voltage on the secondary electron discriminator (a component of the scanning electron microscope), according to the position of the beam.

The signal at the output of the video amplifier 5 is displayed on a cathode-ray tube (CRT) 15, and the horizontal scan for the CRT is supplied by digital scan generator 12. Digital scan generator 12 also supplies a signal to a beam blanking control 17 that supplies a signal to the beam blanking elements of the scanning electron microscope. Beam blanking occurs during retrace and wherever it is desirable to not expose the specimen to the primary electrons.

An image storage control 19 selectively records the output of video amplifier 5, and selectively supplies a signal to scan converter 6 for displaying the stored image on TV monitor 3. Digital scan generator 12 supplies a signal for producing the output image storage control 19 in synchronism with the scanning electron microsc...