Browse Prior Art Database

Solidification Lock for Alignment Fixture

IP.com Disclosure Number: IPCOM000086374D
Original Publication Date: 1976-Aug-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 2 page(s) / 45K

Publishing Venue

IBM

Related People

Wardly, GA: AUTHOR

Abstract

This fixture provides a solidification lock utilizing a low-melting point (30-50 degrees C) thin film of a metal such as solder or a wax, to lock on a fixture of the type described in "Alignment Fixture for X-ray Lithography," by C. A. Wardly, IBM Technical Disclosure Bulletin, Vol. 19, No. 3, August 1976, pages 1123 to 1125. It is adapted to optical, electron-beam, and other forms of resist exposure.

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Solidification Lock for Alignment Fixture

This fixture provides a solidification lock utilizing a low-melting point (30-50 degrees C) thin film of a metal such as solder or a wax, to lock on a fixture of the type described in "Alignment Fixture for X-ray Lithography," by C. A. Wardly, IBM Technical Disclosure Bulletin, Vol. 19, No. 3, August 1976, pages 1123 to 1125. It is adapted to optical, electron-beam, and other forms of resist exposure.

A separate alignment system is required to perform relatively fast registration mark detection and alignment. This prevents the solid angle A of the X-ray illumination from being occupied by alignment devices and detection devices. In order to be removed from the alignment and detection system, the mask wafer set must be locked into position. Mechanical locking mechanisms do not operate without causing some ancillary motion. This would cause a misregistration.

In the drawing, a mask holder 14 for mask 16 and wafer holder 20 and clamp 45 for wafer 18 are locked into position relative to each other by low-melting point films 12. Films 12 are used to connect segments of support pads 9. Pads 9 support holder 14 on holder 20 and their ends are rigidly affixed to the holders 14 and 20 by insulators 13. Insulators 13 composed of ceramic or plastic isolate holders 14 and 20 from pads 9, to isolate pads 9 both thermally and electrically from holders 14 and 20.

Pads 9 include resistance or Peltier effect heating elements 42 which are ...