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Browse Prior Art Database

Heat Focusing Shield in an Evaporation Chamber

IP.com Disclosure Number: IPCOM000086450D
Original Publication Date: 1976-Sep-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 2 page(s) / 25K

Publishing Venue

IBM

Related People

Dahlke, GP: AUTHOR [+4]

Abstract

This provides means for sensing the temperature of heater element 6 in an evaporation chamber without exposing the thermocouple sensor T/C to the evaporant stream.

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Heat Focusing Shield in an Evaporation Chamber

This provides means for sensing the temperature of heater element 6 in an evaporation chamber without exposing the thermocouple sensor T/C to the evaporant stream.

The thermocouple is disposed within heat focusing shield 2 in the chamber and is thereby disposed outside of the stream between the evaporation source and the semiconductor wafers 4 on dome 3.

Shield 2 is a reflector which increases the sensitivity of the thermocouple by focusing heat on its junction.

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