Dismiss
InnovationQ will be updated on Sunday, Oct. 22, from 10am ET - noon. You may experience brief service interruptions during that time.
Browse Prior Art Database

Preparation of Copolymers of Methyl Methacrylate and Methacrylic Acid

IP.com Disclosure Number: IPCOM000086530D
Original Publication Date: 1976-Sep-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Johnson, DE: AUTHOR

Abstract

Interest has grown in the use of copolymers of methyl methacrylate and methacrylic acid as a resist material. At present, some of the best performing resists have been prepared in solution, rather than by emulsion or suspension techniques. There is a need for solvent-synthesized copolymers that can be readily isolated and that have molecular weights near 250K. A process has been developed to meet these criteria.

This text was extracted from a PDF file.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 1

Preparation of Copolymers of Methyl Methacrylate and Methacrylic Acid

Interest has grown in the use of copolymers of methyl methacrylate and methacrylic acid as a resist material. At present, some of the best performing resists have been prepared in solution, rather than by emulsion or suspension techniques. There is a need for solvent-synthesized copolymers that can be readily isolated and that have molecular weights near 250K. A process has been developed to meet these criteria.

Toluene was chosen as the solvent, but other similar solvents, e.g., benzene, xylene and mixtures of aromatic and aliphatic solvents could be used. Bromotrichloromethane was chosen as the MW regulator, but likewise similar regulators could be used.

A number of advantages were discovered for this process while it was being studied. Toluene can be readily purified and its high boiling point is useful in this particular process.

The reaction is "self-disciplining", since the product precipitates as it is formed. This makes it easy to isolate and filter. Filtration removes the homopolymers, such as PMMA, and the soluble low MW copolymers. Also, the reaction rate tend to decrease near 60% conversion, the point at which most of the methacrylic monomer has reacted.

1