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Browse Prior Art Database

Two Level Wiring System

IP.com Disclosure Number: IPCOM000086642D
Original Publication Date: 1976-Oct-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 2 page(s) / 47K

Publishing Venue

IBM

Related People

Kenyon, RA: AUTHOR [+2]

Abstract

Support circuits, having a given dimension, for integrated memory cells, having a corresponding dimension smaller than the given dimension, are arranged on a common substrate without compromising the pitch or spacing of the cells along the given dimension by utilizing the wiring system illustrated in the figures.

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Two Level Wiring System

Support circuits, having a given dimension, for integrated memory cells, having a corresponding dimension smaller than the given dimension, are arranged on a common substrate without compromising the pitch or spacing of the cells along the given dimension by utilizing the wiring system illustrated in the figures.

Memory cells 10 to 32 (Fig. 1), each of which may have a dimension smaller than the corresponding dimension of their support circuits, e. g., sense amplifiers 58 to 68, are connected to the support circuits through accessing conductors 34 to 56, which are disposed on a first level, and interconnecting conductors 70 to 80, which are disposed on a second level. Via conductors 82 to 104, each of which has a diameter generally larger than the width of the accessing conductors, are used to join the accessing conductors 34 to 56 to the interconnecting conductors 70 to 80.

The accessing conductors 34 to 56 are formed on any suitable insulating layer 106 disposed on a semiconductor substrate 108 and the interconnecting conductors 70 to 80 are formed on a second insulating layer 110 which insulates the first level accessing conductors 34 to 56 from the second level interconnecting conductors 70 to 80, except where these conductors are joined by the via conductors 82 to 104. A third insulating layer 112 may cover the interconnecting conductors 70 to 80. One of the via conductors 84 is shown more clearly in Fig. 2 as a cross section taken th...