Browse Prior Art Database

Self Sealing Shake Proof Wafer Carrier

IP.com Disclosure Number: IPCOM000086883D
Original Publication Date: 1976-Nov-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 2 page(s) / 35K

Publishing Venue

IBM

Related People

Geany, GM: AUTHOR [+3]

Abstract

The drawing illustrates a self-sealing shake-proof wafer carrier which allows semiconductor wafers to be stored or transported with a minimum of particulate contamination.

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Self Sealing Shake Proof Wafer Carrier

The drawing illustrates a self-sealing shake-proof wafer carrier which allows semiconductor wafers to be stored or transported with a minimum of particulate contamination.

The carrier basically consists of a cylindrical canister 10 open at one end, which has dimensions that permit a loaded wafer carrier 12 to slide freely within it. A pneumatic seal tube 14 is fitted within a groove that is inside the open end of the canister 10. When deflated, the tube is sufficiently flexible to permit the carrier to slide freely within the canister. However, when the tube is inflated, it seals and positions the carrier within the canister.

In communication with the seal tube, such as through a T connection, is a wafer-retaining pneumatic tube 16, which is supported within a groove in the inner periphery of the canister 10 so that it is positioned directly over the wafers retained within the carrier 12. Consequently, when the retaining tube is deflated, a loaded carrier 12 can slide freely beneath it. However, when the retaining tube is inflated, it contacts the wafers and clamps them within the carrier. This permits rotation or other movement of the wafers within the carrier, thereby preventing edge chipping and particulate contamination during transit. An open end 18 of the retaining tube is in communication with an air cavity 20 defined between a diaphragm 22, stretched across the enclosed end of the canister, and the end of the caniste...