Browse Prior Art Database

Artwork Registration System

IP.com Disclosure Number: IPCOM000086941D
Original Publication Date: 1976-Nov-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 2 page(s) / 19K

Publishing Venue

IBM

Related People

Jones, AS: AUTHOR

Abstract

The proposed system is applicable to thin film devices and eliminates the need to provide, for a plurality of masks, registration marks which render portions of the substrate unusable for devices. Conversely, the system enables machining of the substrate to take place before device fabrication.

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Artwork Registration System

The proposed system is applicable to thin film devices and eliminates the need to provide, for a plurality of masks, registration marks which render portions of the substrate unusable for devices. Conversely, the system enables machining of the substrate to take place before device fabrication.

The marks 1, 2, 3 comprise portions of the successive patterns to be deposited, and are formed on a machined glass substrate. They are then electrically isolated from the subsequent layers by covering with a quartz or other transparent insulating layer. Preferably, the marks are etched in a chromium layer or other reflective material.

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