Browse Prior Art Database

Automatic Mask Loading Tooling

IP.com Disclosure Number: IPCOM000087092D
Original Publication Date: 1976-Dec-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 2 page(s) / 40K

Publishing Venue

IBM

Related People

Mack, A: AUTHOR [+2]

Abstract

This system is used to automatically load and unload masks into a mask carrier from a multiple mask storage container.

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Automatic Mask Loading Tooling

This system is used to automatically load and unload masks into a mask carrier from a multiple mask storage container.

Masks are removed from the storage container 1 by an air jet onto a multi- directional air track 2 which conveys the mask to the mask holder 3. At the mask holder, the mask is positioned against three locating pins by directional air and held in place by mechanical clamping. The mask holder (carrier) locates in the system on a vee notch and flat against two pins; a spring-loaded roller holds the carrier against the pins and maintains registration. The mask is located in the carrier on its front surface. After the mask has been exposed, it is unclamped from the mask holder and removed by an air jet to the multi-directional air track to be returned to a slot in the same storage container. The storage container then indexes down to the next mask and repeats the load/unload operation.

After the mask is located and clamped in the mask carrier a device containing an air knife 4 and exhaust chamber 5 is traversed across the mask. The air knife removes all loose particles from the mask.

An enclosure 6, encompassing the mask loading mechanism, external transfer mechanism 7 and entry chamber 8, is provided. A filter 9 with an area static eliminator 10 mounted above this mechanism provides static-free vertical flow air 11 to the enclosure.

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