Browse Prior Art Database

Wafer Fixture

IP.com Disclosure Number: IPCOM000087114D
Original Publication Date: 1976-Dec-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 2 page(s) / 40K

Publishing Venue

IBM

Related People

Bohg, A: AUTHOR [+2]

Abstract

For crystallographically testing semiconductor wafers in vertical alignment, they are individually clamped in a guide frame, for example, of a goniometer, taking care that the wafers are not tensioned, that their surface remains undamaged, and that none of their areas are covered during X-ray topography.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 2

Wafer Fixture

For crystallographically testing semiconductor wafers in vertical alignment, they are individually clamped in a guide frame, for example, of a goniometer, taking care that the wafers are not tensioned, that their surface remains undamaged, and that none of their areas are covered during X-ray topography.

For holding wafer 1 in goniometer 2 with pivotable guide ring 3, a suitably shaped tantalum tape 4 serves as a two-point support. In the plane of rotation of goniometer 2, structureless transparent plastic foils 6 are arranged on both sides of a plastic ring 5, wafer 1 being held between said foils. Plastic foils 6 can also have a plurality of circular recesses 6a, through which the position of wafer 1 can be corrected.

1

Page 2 of 2

2

[This page contains 2 pictures or other non-text objects]