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Chemical Analysis of a Surface Spot by Simultaneous SIMS Auger Measurements

IP.com Disclosure Number: IPCOM000087124D
Original Publication Date: 1976-Dec-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Kaus, G: AUTHOR [+2]

Abstract

For surface and in-depth concentration profile measurements, the analyzers of SIMS (secondary ion mass spectroscopy) and AES (auger electron spectroscopy) are positioned in the same UHV-chamber in such a way that simultaneous measurements can be made on the same spot of the sample. This method overcomes the known disadvantage of separate measurements and allows the exact and real correlation of the recorded data.

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Chemical Analysis of a Surface Spot by Simultaneous SIMS Auger Measurements

For surface and in-depth concentration profile measurements, the analyzers of SIMS (secondary ion mass spectroscopy) and AES (auger electron spectroscopy) are positioned in the same UHV-chamber in such a way that simultaneous measurements can be made on the same spot of the sample. This method overcomes the known disadvantage of separate measurements and allows the exact and real correlation of the recorded data.

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