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Frictionless Bearing Support for Vacuum Transport

IP.com Disclosure Number: IPCOM000087254D
Original Publication Date: 1977-Jan-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 2 page(s) / 29K

Publishing Venue

IBM

Related People

Miller, DL: AUTHOR

Abstract

In the manufacturing of integrated circuit components on wafers, many operations are carried out in vacuum chambers and are very sensitive to contamination. One possible source of contamination is the bearing system used in the transporting of wafers from one work station to another, and which can give off vaporized lubricants or wear particles.

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Frictionless Bearing Support for Vacuum Transport

In the manufacturing of integrated circuit components on wafers, many operations are carried out in vacuum chambers and are very sensitive to contamination. One possible source of contamination is the bearing system used in the transporting of wafers from one work station to another, and which can give off vaporized lubricants or wear particles.

The transport system set out here uses a magnetic suspension system to support the wafer holder without contact with fixed supports. In the drawing, a pallet 1 supports a wafer dome 2 which carries a number of wafers 3 for processing. The pallet 1 is supported above a fixed rail 4 by magnets 5 on the pallet, with magnets 6 on rail 4 having their poles opposed to those of magnets 5. Other opposed pairs of magnets 7 and 8 at the upper ends of rail 4 and the top of pallet 1 are effective to hold the pallet 1 against sideward movement within the rail 4.

Positioning of pallet 1 at a work station and movement of a pallet into and out of a station may be performed electromagnetically without bearings or physical contact by using holding coils and by using known types of linear motors operated from controllers outside of the vacuum chamber.

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