Browse Prior Art Database

Substrate Gripper

IP.com Disclosure Number: IPCOM000087303D
Original Publication Date: 1977-Jan-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 2 page(s) / 25K

Publishing Venue

IBM

Related People

Boudah, RF: AUTHOR [+2]

Abstract

This article describes a novel edge-contact wafer holder which interacts with a Bernoulli head pick-up device to load and unload a semiconductor wafer. The holder maintains a constant pressure on the wafer during processing without contacting the face of the wafer, and further permits the wafer to be treated in any position including an inverted one.

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Substrate Gripper

This article describes a novel edge-contact wafer holder which interacts with a Bernoulli head pick-up device to load and unload a semiconductor wafer. The holder maintains a constant pressure on the wafer during processing without contacting the face of the wafer, and further permits the wafer to be treated in any position including an inverted one.

The wafer holder, as shown in the figure, comprises a base 10 having a multiplicity of evenly spaced pivotable spring-loaded gripper fingers 11 disposed thereon. These fingers are designed to hold the wafer 12 deposited onto the holder by a Bernoulli head 13.

The Bernoulli head 13 engages an extended loading lever 14 on the fingers 11, causing the fingers to turn around a pivot point 15 and to open such that a wafer 12 can be deposited between the gripper fingers. Each of the fingers are independently spring loaded with a spring 16 calculated to maintain a constant pressure over a given range to allow for thermal expansion and contraction differentials between the substrate and the holder. The finger is further provided with a protrusion 17 located just below the actual wafer gripping edge 18 of the fingers 11. This protrusion provides a resting place to maintain the wafer off the body of the gripper during the actual transfer operation from the Bernoulli head to the holder. Because this finger is elongated, it tends to support the wafer at only a single point. Thus, as the Bernoulli head 13 is with...