Browse Prior Art Database

Self Pressurized Container with Pressure Indicator

IP.com Disclosure Number: IPCOM000087342D
Original Publication Date: 1977-Jan-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 2 page(s) / 41K

Publishing Venue

IBM

Related People

Ross, T: AUTHOR

Abstract

The container 10, illustrated above, is useful for storage and transport of a semiconductor wafer in a particle free, noncontaminating atmosphere. The container comprises a cylindrical base 11 including a circumferentially extending flange portion 11A with an upstanding wall portion 11B, and a pedestal portion 11C with a circumferentially extending 0-ring 11D thereon for engaging the underside of a planar workpiece such as a semiconductor wafer 12.

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Self Pressurized Container with Pressure Indicator

The container 10, illustrated above, is useful for storage and transport of a semiconductor wafer in a particle free, noncontaminating atmosphere. The container comprises a cylindrical base 11 including a circumferentially extending flange portion 11A with an upstanding wall portion 11B, and a pedestal portion 11C with a circumferentially extending 0-ring 11D thereon for engaging the underside of a planar workpiece such as a semiconductor wafer 12.

A cup shaped cover 13, having a circumferentially extending and depending flange portion 14, includes a bellows 15 having a tell-tale or indicator 16 thereon. The cover is adapted to rest on the flange 11A associated with the base 11. A circumferentially extending 0-ring 17, in the upstanding side wall 11B of the base, serves to engage the depending flange 14 of the cover, and effect a radial seal of the atmosphere within the container. The cover 13 is held to the base 11 by twist clamps 18 or the like, while the pressure beneath the wafer 12 is expelled to the atmosphere by way of bore 19, the pressure within the container causing the bellows 15 to expand and the tell-tale to be exposed through the aperture or slot 20 in the cover.

In this manner, the operator may tell whether the container has remained substantially air tight and under pressure even after prolonged periods of storage.

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