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Browse Prior Art Database

Wafer Stepper System

IP.com Disclosure Number: IPCOM000087364D
Original Publication Date: 1977-Jan-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 2 page(s) / 53K

Publishing Venue

IBM

Related People

Duffy, JF: AUTHOR [+4]

Abstract

This is a computer-controlled semiconductor wafer stepper, which is used in an interrupt-driven system, providing interrupt drive and wafer protection. A wafer stepper system, such as the Electroglas 1034 System, is used with a computer-controlled test system, such as the IBM System/7 coupled to a Fairchild 5000C tester. The test system is entirely interrupt-driven, which requires additional equipment for the wafer stepper. This is shown in Fig. 1 as the process interrupt hardware, the cabling from the interface to the process interrupt hardware and the computer process interrupt line.

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Wafer Stepper System

This is a computer-controlled semiconductor wafer stepper, which is used in an interrupt-driven system, providing interrupt drive and wafer protection. A wafer stepper system, such as the Electroglas 1034 System, is used with a computer-controlled test system, such as the IBM System/7 coupled to a Fairchild 5000C tester. The test system is entirely interrupt-driven, which requires additional equipment for the wafer stepper. This is shown in Fig. 1 as the process interrupt hardware, the cabling from the interface to the process interrupt hardware and the computer process interrupt line.

The process interrupt hardware is shown schematically in Fig. 2 in which the various interrupt signals are transmitted through relatively simple logic to the computer process interrupt output line.

Fig. 3 is a flow chart illustrating the interrupt handler stepper control logic following the occurrence of a stepper interrupt signal. The logic compares an expected condition with the newly-changed condition to provide a highly- responsive, fail-safe system.

The X and Y variable step command shown in Fig. 3 is generated from a wafer-map-coordinate list of standard X- and Y-site coordinates. The map contains the X- and Y-site periodicity in mils, and the standard site map coordinates are in integers. If X- and Y-site periodicity are set to unity, the standard map coordinates become absolute coordinates in mils.

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