Browse Prior Art Database

Resist Coating Solutions Containing Water

IP.com Disclosure Number: IPCOM000087557D
Original Publication Date: 1977-Feb-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Chiu, GT: AUTHOR [+2]

Abstract

Solutions of resists which, for example, comprise either a mixture of an alkali-soluble novolak resin with an orthoquinone diazide sensitizer or methacrylate polymers and copolymers and other polymers are normally mad up in organic solvents for coating layers of the resists on substrates. The coatability of these solutions is improved, and resist layers having fewer surface defects are obtained by adding 0.5 to 10% of water to the organic solvent solutions.

This text was extracted from a PDF file.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 1

Resist Coating Solutions Containing Water

Solutions of resists which, for example, comprise either a mixture of an alkali-soluble novolak resin with an orthoquinone diazide sensitizer or methacrylate polymers and copolymers and other polymers are normally mad up in organic solvents for coating layers of the resists on substrates. The coatability of these solutions is improved, and resist layers having fewer surface defects are obtained by adding 0.5 to 10% of water to the organic solvent solutions.

1