Browse Prior Art Database

Measuring Point Probing Device

IP.com Disclosure Number: IPCOM000087560D
Original Publication Date: 1977-Feb-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 2 page(s) / 74K

Publishing Venue

IBM

Related People

Haecker, H: AUTHOR [+2]

Abstract

This device allows the probing of two signals in any position on the measuring points of a substrate in a system environment, while another probing process is performed on adjacent substrates. In the design any movement in the x- or y-direction is prohibited as long as the probing tip is in the measuring position.

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Measuring Point Probing Device

This device allows the probing of two signals in any position on the measuring points of a substrate in a system environment, while another probing process is performed on adjacent substrates. In the design any movement in the x- or y-direction is prohibited as long as the probing tip is in the measuring position.

Probing device 1 is clamped to substrate 2 for aligning the tool to the pad pattern. Two separate probing arms 3 and 4, carrying spring-loaded tips 3a and 4a, are located on clamped base plate 5 and are individually adjustable to any two pads on the substrate, even if they are immediately adjacent to each other.

Probing arms 3 and 4 are both movable up (arm 4 in Fig. 1) and down (arm 3 in Fig. 1) as well as in an x- and y-direction. In the down-position, when tips 3a, 4a are positioned on a pad, any x- or y-movement is prevented. Driving mechanisms for probing arms 3 and 4 are identical, but operate independently of each other.

X-movement is achieved by a two-point cam-follower arrangement, translating a rotational movement of arm 3, which is pivoted to arm carrier 6 by screws 16, into a linear x-movement of tip 3a. For this purpose, arm carrier 6 of arm 3 is guided by cam-follower stud 7 within curved groove 8 and by slotted hole 9 cooperating with bolt 10, which is in a fixed position on carrier 11.

Low- and high-speed transmission 12 is provided to drive a worm-gear combination 13 which turns threaded shaft 14, whereby...