Browse Prior Art Database

Measuring the Parallelism of Planar Items by Interferometry

IP.com Disclosure Number: IPCOM000087624D
Original Publication Date: 1977-Feb-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Styles, BW: AUTHOR

Abstract

Two sides of planar parts can be optically tested for parallelism using interferometric techniques. The item to be measured is wrung into the optical flat to minimize the fringe lines.

This text was extracted from a PDF file.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 1

Measuring the Parallelism of Planar Items by Interferometry

Two sides of planar parts can be optically tested for parallelism using interferometric techniques. The item to be measured is wrung into the optical flat to minimize the fringe lines.

The interference fringe lines are observed through the optical flat according to standard interferometry methods. The optical flat with the part is then turned over and rested on the interferometer test plate. The interferometer is adjusted until the fringe lines on the optical flat are eliminated. The resultant fringe lines detected on the part are a measure of the parallelism of the two sides of the part.

1