Browse Prior Art Database

Particulate Remover

IP.com Disclosure Number: IPCOM000087693D
Original Publication Date: 1977-Mar-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 2 page(s) / 38K

Publishing Venue

IBM

Related People

Pridans, JV: AUTHOR

Abstract

This apparatus removes micron-size particles from the surface of extended flat sheets. It is particularly useful for preparing sheets of unfired ceramic which are to be subsequently formed into substrates employed in the manufacture of large-scale integrated-circuit devices.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 2

Particulate Remover

This apparatus removes micron-size particles from the surface of extended flat sheets. It is particularly useful for preparing sheets of unfired ceramic which are to be subsequently formed into substrates employed in the manufacture of large-scale integrated-circuit devices.

Cylindrical roller brush 1 has a nap 1a of closely spaced filaments or fibers. Brush 1 is mounted to rotate freely and to graze lightly, i.e., make light contact with, the surface S of ceramic substrate sheet W, as sheet W moves in the direction X. Nozzle 2 provides a noncontaminating stream of gas, e.g., air, which rotates brush 1 by establishing an air flow between surface S and brush 1. A vacuum exhaust cover 3 encloses brush 1 and collects the particulates and any debris loosened thereby from surface S.

Preferably, the gas from nozzle 2 is ionized to help reduce particulate adhesion to surface S. Excessive electrostatic charges caused by the rubbing of brush 1 on surface S are discharged through a suitable electrostatic elimination device 4 after cleaning.

1

Page 2 of 2

2

[This page contains 2 pictures or other non-text objects]