Browse Prior Art Database

Wafer Holder

IP.com Disclosure Number: IPCOM000087719D
Original Publication Date: 1977-Mar-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 2 page(s) / 46K

Publishing Venue

IBM

Related People

Clark, HA: AUTHOR [+2]

Abstract

A wafer holder holds wafers back to back in intimate contact so that the back of each wafer is not attacked during glow-discharge gas etching.

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Wafer Holder

A wafer holder holds wafers back to back in intimate contact so that the back of each wafer is not attacked during glow-discharge gas etching.

Holder 1 is made of aluminum or other material which is not attacked by the gas plasma. Sides 2 and 3 are joined to and arranged to pivot around a V- slotted bar 4 between an open position (Fig. 1) and a closed position (Fig. 2). Sides 2 and 3 have V-slotted bars 5 and 6 for holding wafers 7. Two wafers are placed back to back in each corresponding slot 8 of bars 4 and 5 with holder 1 in the open position. The holder is then closed and the weight of wafers 7 keeps holder 1 in a closed position in a cantilever fashion.

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