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Browse Prior Art Database

Rod Feed Control

IP.com Disclosure Number: IPCOM000087769D
Original Publication Date: 1977-Mar-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 2 page(s) / 73K

Publishing Venue

IBM

Related People

Christenberry, RE: AUTHOR [+4]

Abstract

The control of the feeding of a rod 1 of material that is to be heated for deposition on a substrate is illustrated in the figure. The height of the rod 1 must be accurately controlled and smoothly positioned for good deposition.

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Rod Feed Control

The control of the feeding of a rod 1 of material that is to be heated for deposition on a substrate is illustrated in the figure. The height of the rod 1 must be accurately controlled and smoothly positioned for good deposition.

The rod 1 is clamped into a holder 2 having a follower thread connection to a worm drive lead screw gear 3. The worm gear 3 is rotated by a suitable drive means such as a low speed motor (not shown) located at the base of the apparatus. The holder 2 is journaled to two shafts 4 and 5 for smooth motion. The holder 2 is Y-shaped for dual slidable connection to shaft 4 and singular slidable connection to shaft 5. This provides firm up and down control of the rod feed.

A light beam source 6 emits a light beam 7 that passes through an opening 8 in the side of a hearth 9 into which the rod 1 protrudes. A second opening 10 permits the light beam to exit from the hearth 9 for sensing by a suitable sensing apparatus 11, such as a photodiode. A recess 12 is located in the bottom of the cavity of the hearth 9 that surrounds the source rod 1. The bottoms of openings 8 and 10 are slightly below the lip of the orifice of the opening in the bottom of the hearth 9 for the rod to pass through into the hearth. The light beam source 6 and the sensing apparatus 11 are suitably journaled to a shaft 13 and support plates 14, respectively, such that the rod height light beam checking device moves up and down with the rod 1. The hearth 9 is fir...