Browse Prior Art Database

Metal Membrane Nozzle for Ink Jet Printer

IP.com Disclosure Number: IPCOM000087835D
Original Publication Date: 1977-Mar-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 2 page(s) / 49K

Publishing Venue

IBM

Related People

Lane, R: AUTHOR

Abstract

A method of making a metal membrane nozzle for an ink jet printing system is described. A silicon substrate 2 has a hole 4 etched therein in the shape of a truncated pyramid, utilizing known etching techniques. A protective layer 6, for example SiO(2), is formed on all exposed surfaces of the substrate 2, and a second protective layer 8, for example Si(3)N(4), s formed on the entrance side of the nozzle.

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Metal Membrane Nozzle for Ink Jet Printer

A method of making a metal membrane nozzle for an ink jet printing system is described. A silicon substrate 2 has a hole 4 etched therein in the shape of a truncated pyramid, utilizing known etching techniques. A protective layer 6, for example SiO(2), is formed on all exposed surfaces of the substrate 2, and a second protective layer 8, for example Si(3)N(4), s formed on the entrance side of the nozzle.

Next, as illustrated in Fig. 2, a metal film 10, for example, platinum or gold, is sputtered on the exit surface of the substrate 2.

Then, as illustrated in Fig. 3, the SiO(2) layer 6 on the interior of the nozzle is etched away from the walls thereof, leaving a metal membrane 12 on the exit aperture of the nozzle.

Finally, a metal film 14 (Fig. 4), for example, platinum or gold, is sputtered on the entrance side of the nozzle and the interior thereof to form a completely metallized ink jet nozzle which is impervious to attack by alkaline inks, as well as being able to withstand normal wear to a greater extent than a silicon nozzle not coated with a metal surface.

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