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Tool for Electro Discharge Machining of Narrow Slots

IP.com Disclosure Number: IPCOM000087866D
Original Publication Date: 1977-Mar-01
Included in the Prior Art Database: 2005-Mar-03
Document File: 2 page(s) / 28K

Publishing Venue

IBM

Related People

Geldermans, P: AUTHOR

Abstract

An inexpensive and accurate method for making narrow slots in a conductive material is described. The above figure shows the structure of the tool. It comprises a piece of round stock S from which a small portion has been machined, providing a flat surface A. A further machining operation in flat A provides a groove G therein. Then, using well-known photolithographic and etching techniques, notches N are etched at a desired spacing in flat A. Wires (not shown) are then placed in notches N, spanning groove G. This is accomplished by winding a continuous wire around piece S. This tool, with taut wires in grooves N, can be used to carry out electro-discharge machining at the edge of a thin piece of conductive material, such as silicon, which is doped to be conductive.

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Tool for Electro Discharge Machining of Narrow Slots

An inexpensive and accurate method for making narrow slots in a conductive material is described. The above figure shows the structure of the tool. It comprises a piece of round stock S from which a small portion has been machined, providing a flat surface A. A further machining operation in flat A provides a groove G therein. Then, using well-known photolithographic and etching techniques, notches N are etched at a desired spacing in flat A. Wires (not shown) are then placed in notches N, spanning groove G. This is accomplished by winding a continuous wire around piece S. This tool, with taut wires in grooves N, can be used to carry out electro-discharge machining at the edge of a thin piece of conductive material, such as silicon, which is doped to be conductive.

It is also possible to carry out electro-discharge machining to provide multiple rows of slots by introducing one or more wires orthogonally to those which fit into grooves N. This would entail the use of similarly fabricated notches 0.

The tool can be fabricated very simply and provides a way for quickly obtaining slots of different spacing and dimensions. In addition, damaged tools can be reused by simply replacing the eroded wires. Typical tool dimensions are as follows: Length of tool - 1.5 inches Depth of groove G - 20 mils Width of groove G - 50 mils Depth of notches N, 0 - 1 mil Width of notches N, 0 - 1.5 mils

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