Browse Prior Art Database

Wafer Registration Chuck

IP.com Disclosure Number: IPCOM000088039D
Original Publication Date: 1977-Apr-01
Included in the Prior Art Database: 2005-Mar-04
Document File: 3 page(s) / 114K

Publishing Venue

IBM

Related People

Cachon, RP: AUTHOR

Abstract

Shown is a modification of a Perkin Elmer chuck to achieve accurate wafer positioning in relation to chuck registration. This modification enables chuck-to-chuck compatibility in regard to wafer positioning versus chuck registration.

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Wafer Registration Chuck

Shown is a modification of a Perkin Elmer chuck to achieve accurate wafer positioning in relation to chuck registration. This modification enables chuck-to- chuck compatibility in regard to wafer positioning versus chuck registration.

On the Migralign projection mask aligner of Perkin Elmer, two wafer chucks are employed. One in the process station and one at the load/ unload station. Both chucks are identical. The chuck (Fig. 1) is made of a chuck base on which three registration dowel pins are press fitted and located radially, equally spaced and on the outside diameter of the chuck. Inside the chuck, a thin diaphragm is mounted and held securely to the chuck base. Also, inside the chuck and located on top of the diaphragm is the wafer pedestal. The original pedestal had two fixed pins to locate the wafer notch and a reference stop for the wafer side.

This modification provides means to position the wafer within a narrow specification. The registration system is made of four basic units 9, the yoke arm, the yoke support, the notch roller support and the yoke leaf spring (Figs. 2 and 3).

The notch roller supports the yoke assembly through a shaft that is held fixed with the yoke. The shaft and the yoke can rotate on a limited arc, and the shaft position can be adjusted along its axis with two screws. This provides the yoke centering (Fig. 4). The yoke supports two registration rolling pins. The rolling pins are mounted through a pair of...